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Confocal imaging
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Confocal imaging
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Product Code: ATM8600
application
ATM8600 3D Laser Scanning Microscope is self-designed to perform non-contact profile, roughness, and film thickness measurements
with nanometre-level resolution on any material or shape. It’s principle of confocal technology, combined multiple holes disk for parallel scanning technology, high precision z-direction scanning module, and 3D modelling algorithm can scan on the
object surface non-contact profile and 3D images, the software process 3D images to process and analyze data, result in ATM8600 used for 2D, 3D optical measuring instrument.
Confocal microscope is used to measure various from smooth to rough , from low to high reflectivity object surface, from nano-level to micron-level parts roughness, flatness, geometric profile microscopy, curvature etc. Measure result can be fully compliant with ISO, ASME, EUR, GBT
international standards.
| atm8600 | |
| Principle | Confocal Microscopy Optics System |
| Objectives | 5 holes electric |
| FOV range | 160×160 μm~1.6×1.6 mm |
| Scan rate | ≥10HZ In the temperature 20±2℃, 20x objectives, measure 4.7µm golden tile sample |
| Height Repeatability | 20×：40nm / 50×：20nm / 100×：20nm In the temperature 20±2℃ measure 4.7µm golden tile sample |
| Height Accuracy | ± (0.2+L/100) μm |
| Height Display resolution | 0.5nm |
| Width Repeatability | 20×：100nm；50×：50nm；100×：30nm In the temperature 20±2℃ measure 4.7µm golden scale line sample |
| Width Accuracy | ± 2% |
| Width Display resolution | 1nm |
| XY stage size | 210×210 mm |
| XY stage Move range | 100×100 mm |
| XY stage loading | 10Kg |
| XY stage Control mode | Electric |
| Z-direction range | 100 mm |
| Illumination Light source | LED |
| Illumination Max. output | 840mW |
| Working condition | Temp: 10℃~35℃，temperature gradient < 1℃/15 minutes， Humidity: 30~80%, vibration<0.002g |
| ftir spectrometer | |
| Dimensions | 590×390×540mm |
| Weight | 45Kg |
| Electrical parameter | |
| Power supply | AC220V/50Hz |
- Super fun of 3D measuring on the confocal microscope
- Precision fabrication: 3D profile, angle of high precision stylus tip
- Glass panel: 3D profile, profile size of light guide plate（LGP）
- Optical communication: 3D profile, Radius of curvature of microlens
- Photovoltaic: 3D profile, tile height &width of grid-lines solar system
- High precision angular sample
- Semi-conductor manufacturing and encapsulation processing
- Glass panel display and high precision component of electronic products
- Optics manufacturing, micron-sized nano-materials manufacturing
- Car parts manufacturing
- Microelectromechanical systems (MEMS) component manufacturing
- High precision fabrication sectors
- Aerospace, defense and military
- Scientific research
